Gas Measured Nitrogen Trifluoride (NF3) Cartridge Part Number MIDAS-S-XHF 1 year standard warranty MIDAS-E-XHF 2 year extended warranty Sensor Technology 3 electrode electrochemical cell Measuring Range (ppm) NF3 0 - 40 ppm Minimum Alarm 1 Set Point 4.0ppm Repeatability < ± 10% of measured value Linearity < ± 20% of measured value Response Time t 62.5 < 110 seconds Sensor Cartridge Life Expectancy ≥ 24 months under typical application conditions Operating Temperature 0°C to +40°C (32°F to 104°F) Effect of Temperature < ± 0.002ppm / °C (at 0°C to 20°C) Zero < ± 0.008ppm / °C (at 20°C to 40°C) Sensitivity < ± 0.4% of measured value / °C Operating Humidity (continuous) 20 – 75% rH 1 Effect of Humidity Zero < ± 0.003ppm / % rH Sensitivity < ± 1% of measured value / % rH Operating Pressure 90 - 110kPa Effect of Position No effect in typical application Long Term Drift Zero No drift Sensitivity < 15% of measured value / year Calibration Gas Hydrogen Fluroide (HF) Challenge Gas (Bump Test) Chlorine (Cl2 ) Warm Up Time < 20 minutes Storage Temperature +5°C to +25°C (+41°F to +77°F)

所列传感器数据基于理想的测试环境；观察到的性能可能因

实际监测系统和采用的采样条件。

三氟化氮传感器盒需要单独的热解器模块（MIDAS-T-NP1）

发现

每6个月进行一次气体校准，并确保安装点的恒温

NF3通过热击穿。为了保持规定的性能，建议执行

50-104华氏度（10-40摄氏度），湿度为30-70%相对湿度。

否则，需要更频繁的碰撞测试或振动来确认工作规范